An article in Solid State Technology, "Orthogonal Design for Pr... | Filo
An article in Solid State Technology, "Orthogonal Design for Pr... | Filo
9 months ago
askfilo.com
SOLVED:In "Orthogonal Design for Process Optimization and Its Application to Plasma Etching" (Solid State Technology, May 1987 ), G. Z. Yin and D. W. Jillie described an experiment to determine the effect of C2  F6 flow rate on the uniformity of the etch on a silicon wafer used in integrated circuit manufacturing. Three flow rates are used in the experiment, and the resulting uniformity (in percent) for six replicates follows. (a) Does C2  F6 flow rate affect etch uniformity? Construct box plots
SOLVED:In "Orthogonal Design for Process Optimization and Its Appl…
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